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MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing
Kyongtae Kim,Hong-Beom Kwon,Hye-Rin Ahn,Yong-Jun KimVolume:
5
Language:
english
Journal:
Micro and Nano Systems Letters
DOI:
10.1186/s40486-016-0039-1
Date:
December, 2017
File:
PDF, 1.38 MB
english, 2017