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A sacrificial layer strategy for photolithography on highly hydrophobic surface and its application for electrowetting devices
Zhang, Han, Yan, Qiuping, Xu, Qingyu, Xiao, Changshi, Liang, XueleiVolume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-017-04342-z
Date:
December, 2017
File:
PDF, 1.96 MB
english, 2017