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[IEEE 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Toyama, Japan (2017.2.28-2017.3.2)] 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Surface preparation and wet cleaning for Germanium surface
Otsuji, Masayuki, Yoshida, Yukifumi, Takahashi, Hiroaki, Sebaai, Farid, Wostyn, Kurt, Holsteyns, Frank, Sato, Masanobu, Shirakawa, HajimeYear:
2017
Language:
english
DOI:
10.1109/EDTM.2017.7947551
File:
PDF, 815 KB
english, 2017