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SPIE Proceedings [SPIE Second International Conference on Photonics and Optical Engineering - Xi'an, China (Friday 14 October 2016)] Second International Conference on Photonics and Optical Engineering - Improved image quality of digital lithography using modified particle swarm optimization algorithm
Zhang, Chunmin, Asundi, Anand, Zhang, Liang, Shi, ZhaoJun, Li, QishenVolume:
10256
Year:
2017
Language:
english
DOI:
10.1117/12.2257457
File:
PDF, 481 KB
english, 2017