SPIE Proceedings [SPIE SPIE Optical Metrology - Munich,...

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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Optical Measurement Systems for Industrial Inspection X - Development of metrology for freeform optics in reflection mode

Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Burada, Dali R., Pant, Kamal K., Mishra, Vinod, Bichra, Mohamed, Khan, Gufran S., Sinzinger, Stefan, Shakher, Chandra
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Volume:
10329
Year:
2017
Language:
english
DOI:
10.1117/12.2270284
File:
PDF, 805 KB
english, 2017
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