Thickness measurement of deterioration layer of monocrystalline silicon by specific crystallographic plane cutting of wire electrical discharge machining
Mengxing Ge,Zhidong Liu,Lida Shen…Volume:
27
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-016-4945-z
Date:
September, 2016
File:
PDF, 1.17 MB
english, 2016