Gas–surface reactions in the growth of dielectric films by...

Gas–surface reactions in the growth of dielectric films by chemical vapor deposition: The role of nonequilibrium surface diffusion of adsorbed precursors

S. Ya. Umanskii
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10
Language:
english
Journal:
Russian Journal of Physical Chemistry B
DOI:
10.1134/S1990793116050250
Date:
September, 2016
File:
PDF, 439 KB
english, 2016
Conversion to is in progress
Conversion to is failed