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[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Optical and Electrical Methods to Measure the Dynamic Behavior of a MEMS Gyroscope Sensor
Cigada, Alfredo, Leo, Elisabetta, Vanali, MarcelloVolume:
2005
Year:
2005
Language:
english
DOI:
10.1115/IMECE2005-81022
File:
PDF, 739 KB
english, 2005