THE EFFECTS OF BORON DOPING ON RESIDUAL STRESS OF HFCVD...

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Surface Review and Letters 2017 / 05

THE EFFECTS OF BORON DOPING ON RESIDUAL STRESS OF HFCVD DIAMOND FILM FOR MEMS APPLICATIONS

ZHAO, TIANQI, WANG, XINCHANG, SUN, FANGHONG
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Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X18500397
Date:
May, 2017
File:
PDF, 3.73 MB
english, 2017
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