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Consideration of the fringe effects of capacitors in micro accelerometer design
Zhou, Wu, Lan, Hongfang, Yu, Huijun, Lai, Liushan, Peng, Bei, He, XiaopingLanguage:
english
Journal:
Transactions of the Institute of Measurement and Control
DOI:
10.1177/0142331217711245
Date:
June, 2017
File:
PDF, 1.30 MB
english, 2017