Comparative characteristics of optical methods for...

Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences

A. A. Akhsakhalyan,A. D. Akhsakhalyan…
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Volume:
9
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451015040035
Date:
July, 2015
File:
PDF, 514 KB
english, 2015
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