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Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences
A. A. Akhsakhalyan,A. D. Akhsakhalyan…Volume:
9
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451015040035
Date:
July, 2015
File:
PDF, 514 KB
english, 2015