Preparation and roughness metrology of supersmooth optical...

Preparation and roughness metrology of supersmooth optical surfaces

Yu. A. Vainer,M. V. Zorina,A. E. Pestov…
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Volume:
9
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451015040357
Date:
July, 2015
File:
PDF, 268 KB
english, 2015
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