Prospects of low-coherence tandem interferometry for measurements of aspherical surface profiles
A. A. Akhsakhalyan,A. D. Akhsakhalyan…Volume:
9
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451015040230
Date:
July, 2015
File:
PDF, 209 KB
english, 2015