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Kinetics of structuring of submonolayer carbon coatings on silicon (100) crystals during microwave vacuum-plasma deposition
R. K. Yafarov,V. Ya. ShanyginVolume:
60
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784215060286
Date:
June, 2015
File:
PDF, 2.02 MB
english, 2015