Formation of porous α tantalum in films
Yu. Zh. Tuleushev,V. N. Volodin,A. R. BrodskiiVolume:
60
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784215080277
Date:
August, 2015
File:
PDF, 2.45 MB
english, 2015