![](/img/cover-not-exists.png)
Composition and properties of nanoscale Si structures formed on the CoSi2/Si(111) surface by Ar+ion bombardment
Y. S. ErgashovVolume:
62
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784217050103
Date:
May, 2017
File:
PDF, 573 KB
english, 2017