Composition and morphology of Ti and W coatings deposited on silicon during ion-beam assistance
O. G. Bobrovich,O. M. Mikhalkovich…Volume:
6
Language:
english
Journal:
Inorganic Materials: Applied Research
DOI:
10.1134/S207511331503003X
Date:
May, 2015
File:
PDF, 1.20 MB
english, 2015