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[IEEE 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Opatija, Croatia (2017.5.22-2017.5.26)] 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Kelvin probe force microscopy of gate stack metal alloy films
Hurst, Jeffrey, Lam, Kin-Sang, Bordelon, Clint, Wilson, Michael, Smith, Brian, Phillips, ShaneYear:
2017
Language:
english
DOI:
10.23919/MIPRO.2017.7966593
File:
PDF, 676 KB
english, 2017