High-accuracy three-dimensional aspheric mirror measurement with nanoprofiler based on normal vector tracing method
Kudo, Ryota, Kitayama, Takao, Tokuta, Yusuke, Shiraji, Hiroki, Nakano, Motohiro, Yamamura, Kazuya, Endo, KatsuyoshiVolume:
98
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2017.06.024
Date:
November, 2017
File:
PDF, 1.94 MB
english, 2017