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[IEEE 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Toyama, Japan (2017.2.28-2017.3.2)] 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - The impact of atomic layer depositions on high quality Ge/GeO2 interfaces fabricated by rapid thermal annealing in O2 ambient
Zurauskaite, Laura, Hellstrom, Per-Erik, Ostling, MikaelYear:
2017
Language:
english
DOI:
10.1109/edtm.2017.7947553
File:
PDF, 813 KB
english, 2017