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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 28 August 2016)] Optical System Alignment, Tolerancing, and Verification X - The structure function as a metric for roughness and figure
Sasián, José, Youngworth, Richard N., Parks, Robert E., Tuell, Michael T.Volume:
9951
Year:
2016
Language:
english
DOI:
10.1117/12.2238600
File:
PDF, 500 KB
english, 2016