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Two-dimensional simulations of a VHF H 2 plasma for different discharge gaps and gas pressures
Chen, Kuan-Chen, Ogiwara, Kohei, Chiu, Kuo-Feng, Su, Li-Wen, Uchino, Kiichiro, Kawai, YoshinobuVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.07LD01
Date:
July, 2016
File:
PDF, 3.15 MB
english, 2016