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A plasma electron source for generating beam plasma at low gas pressures
Xu, Jianping, Tian, Xiubo, Gong, Chunzhi, Li, Chunwei, Wu, Mingzhong, Wang, Jiajie, Ma, TianhuiVolume:
143
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.07.003
Date:
September, 2017
File:
PDF, 1.85 MB
english, 2017