A novel method of angular positioning error analysis of...

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ARCHIVE Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture 1989-1996 (vols 203-210) 2017 / 01

A novel method of angular positioning error analysis of rotary stages based on the Abbe principle

Li, Yi-Tsung, Fan, Kuang-Chao
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Language:
english
Journal:
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
DOI:
10.1177/0954405416688936
Date:
January, 2017
File:
PDF, 2.60 MB
english, 2017
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