[IEEE 2017 IEEE International Instrumentation and...

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[IEEE 2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) - Torino, Italy (2017.5.22-2017.5.25)] 2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) - Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror

Faller, Lisa-Marie, Leitzke, Juliana, Zangl, Hubert
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Year:
2017
DOI:
10.1109/I2MTC.2017.7969660
File:
PDF, 1014 KB
2017
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