[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Datamining for yield
Roijen, Raymond Van, Maxson, Jeffery B., Brodfuehrer, Michael, Dyer, Bruce, Meagher, Colleen, Dai, Min, Ayala, Javier, Barthold, Gasner, Steigerwalt, Michael, Wang, Lingjie, McCarthy, David, Rust, TreYear:
2017
Language:
english
DOI:
10.1109/ASMC.2017.7969251
File:
PDF, 1.07 MB
english, 2017