[IEEE 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Toyama, Japan (2017.2.28-2017.3.2)] 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Proximity gettering technology for advanced CMOS image sensors using C3H5 carbon cluster Ion implantation techniques
Kurita, Kazunari, Kadono, Takeshi, Okuyama, Ryosuke, Masada, Ayumi, Koga, Ryou Hirose Yoshihiro, Okuda, HidehikoYear:
2017
Language:
english
DOI:
10.1109/EDTM.2017.7947538
File:
PDF, 253 KB
english, 2017