[IEEE 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Toyama, Japan (2017.2.28-2017.3.2)] 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Effective performance of a tiny-chamber plasma etcher in scallop reduction
Khumpuang, Sommawan, Tanaka, Hiroyuki, Kara, ShiroYear:
2017
Language:
english
DOI:
10.1109/EDTM.2017.7947546
File:
PDF, 419 KB
english, 2017