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[IEEE 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Toyama, Japan (2017.2.28-2017.3.2)] 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) - Development of a half-inch wafer for minimal fab process
Umeyama, Norio, Yamazaki, Atsushi, Sakai, Takaaki, Khumpuang, Sommawan, Hara, ShiroYear:
2017
Language:
english
DOI:
10.1109/EDTM.2017.7947575
File:
PDF, 646 KB
english, 2017