[IEEE 2017 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2017.4.2-2017.4.6)] 2017 IEEE International Reliability Physics Symposium (IRPS) - Conductivity and reliability of 28nm FDSOI middle of the line dielectrics
Federspiel, X., Nouguier, D., Ney, D., Ya, T.Year:
2017
Language:
english
DOI:
10.1109/IRPS.2017.7936366
File:
PDF, 983 KB
english, 2017