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[IEEE 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Opatija, Croatia (2017.5.22-2017.5.26)] 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Solved: The mystery of bright voltage contrast word-line defects for SOI technology using Nanoprobing
Patterson, Oliver D., Hafer, Richard F., Pendyala, Sweta, Zhigang Song,, Hsieh, Brian Yueh-Ling, Tang, XiaohuYear:
2017
Language:
english
DOI:
10.23919/MIPRO.2017.7966586
File:
PDF, 2.05 MB
english, 2017