![](/img/cover-not-exists.png)
Cross-supported planar MEMS vector hydrophone for high impact resistance
Bai, Bing, Ren, Ziming, Ding, Junwen, Xu, Wei, Zhang, Guojun, Liu, Jun, Zhang, Wendong, Xue, Chenyang, Zhang, Binzhen, Wang, RenxinLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.06.010
Date:
June, 2017
File:
PDF, 1010 KB
english, 2017