[IEEE 2017 Joint International EUROSOI Workshop and...

  • Main
  • [IEEE 2017 Joint International EUROSOI...

[IEEE 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Athens, Greece (2017.4.3-2017.4.5)] 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Hydrogen silsesquioxane tri-dimensional advanced patterning concepts for high density of integration in sub-7 nm nodes

Gaben, L., Balan, V., Euvrard, C., Pauliac, S., Dallery, J.-A., Bustos, J., Dechanoz, R., Hemard, B., Koscianski, L., Bossy, X., Arvet, C., Vizioz, C., Barnola, S., Perrot, C., Sturm, J., Exbrayat, Y.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2017
Language:
english
DOI:
10.1109/ULIS.2017.7962617
File:
PDF, 24.42 MB
english, 2017
Conversion to is in progress
Conversion to is failed