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[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Silicon photonic wafer fabrication for education
Lakshminarayanamurthy, Sanjna, Rummage, Nathan A., Mogent, Neville A., Ewbank, Dale E., Steidle, Jeffrey A., Fanto, Michael L., Thomas, Paul M., Preble, Stefan F.Year:
2017
Language:
english
DOI:
10.1109/ASMC.2017.7969226
File:
PDF, 1.56 MB
english, 2017