[IEEE 2017 IEEE International Interconnect Technology...

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[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Electromigration and resistivity in on-chip Cu, Co and Ru damascene nanowires

Hu, C.-K., Kelly, J., Chen, J. H-C, Huang, H., Ostrovski, Y., Patlolla, R., Peethala, B., Adusumilli, P., Spooner, T., Gignac, L. M., Bruley, J., Breslin, C., Cohen, S. A., Lian, G., Ali, M., Long, R.
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Year:
2017
Language:
english
DOI:
10.1109/IITC-AMC.2017.7968977
File:
PDF, 380 KB
english, 2017
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