[IEEE 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Athens, Greece (2017.4.3-2017.4.5)] 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - MOSFETs in the VeSTIC process - fabrication and characterization
Tomaszewski, Daniel, Domanski, Krzysztof, Gluszko, Grzegorz, Sierakowski, Andrzej, Szmigiel, DariuszYear:
2017
Language:
english
DOI:
10.1109/ULIS.2017.7962604
File:
PDF, 991 KB
english, 2017