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SPIE Proceedings [SPIE International Symposium on Optoelectronic Technology and Application 2016 - Beijing, China (Monday 9 May 2016)] Optical Measurement Technology and Instrumentation - Method to fabricate orthogonal crossed gratings by an interference fringe based alignment technique
Han, Sen, Tan, JiuBin, Zhou, Hengyan, Zeng, LijiangVolume:
10155
Year:
2016
Language:
english
DOI:
10.1117/12.2247443
File:
PDF, 1.06 MB
english, 2016