[IEEE 2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) - Kharkiv, Ukraine (2016.6.20-2016.6.24)] 2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) - Application of optical spectral interferometry for thin film thickness measurement
Lukin, Konstantin A., Tatyanko, Dmytro N., Pikh, Alona B.Year:
2016
Language:
english
DOI:
10.1109/MSMW.2016.7538130
File:
PDF, 515 KB
english, 2016