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[IEEE 2015 International Conference on Smart Sensors and Systems (IC-SSS) - Bangalore, India (2015.12.21-2015.12.23)] 2015 International Conference on Smart Sensors and Systems (IC-SSS) - Vertical in-line rotary magnetron sputtering system for large area AZO coatings
Joshi, Varun P., Sreenivasan, M. G., Tomy, Rajive M., Mohanachandran, K.Year:
2015
Language:
english
DOI:
10.1109/SMARTSENS.2015.7873623
File:
PDF, 518 KB
english, 2015