Atomic-scale characterization of plasma-induced damage in...

Applied Surface Science 2017 / 12 Vol. 425

Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

Kim, Kangsik, Oh, Il-Kwon, Kim, Hyungjun, Lee, Zonghoon
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Volume:
425
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.06.241
Date:
December, 2017
File:
PDF, 1.08 MB
english, 2017
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