Effect of thermal annealing sequence on the crystal phase...

Current Applied Physics 2017 / 10 Vol. 17; Iss. 10

Effect of thermal annealing sequence on the crystal phase of HfO 2 and charge trap property of Al 2 O 3 /HfO 2 /SiO 2 stacks

Na, Heedo, Jeong, Juyoung, Lee, Jimin, Shin, Hyunsu, Lee, Sunghoon, Sohn, Hyunchul
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2017.07.006
Date:
October, 2017
File:
PDF, 1.09 MB
english, 2017
Conversion to is in progress
Conversion to is failed