The formation of Ti x N y and Ta x N y -based diffusion...

Materials Today: Proceedings 2017 Vol. 4; Iss. 3

The formation of Ti x N y and Ta x N y -based diffusion barriers

Nussupov, K.Kh., Beisenkhanov, N.B., Beisembetov, I.K., Kenzhaliev, B.K., Seitov, B.Zh., Dulatuly, E., Bakranova, D.I.
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Volume:
4
Year:
2017
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2017.04.026
File:
PDF, 577 KB
english, 2017
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