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Enhanced reliability and capacitance stability of ZrO 2 -based decoupling capacitors by interface doping with Al 2 O 3
Mart, C., Zybell, S., Riedel, S., Czernohorsky, M., Seidel, K., Weinreich, W.Volume:
178
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.05.025
Date:
June, 2017
File:
PDF, 811 KB
english, 2017