Modelling of a radio frequency plasma bridge neutralizer...

Procedia Engineering 2017 Vol. 185

Modelling of a radio frequency plasma bridge neutralizer (RFPBN)

Scholze, F., Eichhorn, C., Bundesmann, C., Spemann, D., Neumann, H., Bulit, A., Feili, D., Amo, J. Gonzalez del

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Volume:

185

Year:

2017

Language:

english

Journal:

Procedia Engineering

DOI:

10.1016/j.proeng.2017.03.284

File:

PDF, 492 KB

english, 2017

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