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Real-Time Feedback Control of Carbon Content of Zirconium Dioxide Thin Films Using Optical Emission Spectroscopy
Ni, Dong, Lou, Yiming, Christofides, Panagiotis D., Lao, Sandy, Chang, Jane P.Volume:
37
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.1016/s1474-6670(17)38790-6
Date:
January, 2004
File:
PDF, 8.58 MB
english, 2004