![](/img/cover-not-exists.png)
Oxides formation on hydrophilic bonding interface in plasma-assisted InP/Al 2 O 3 /SOI direct wafer bonding
Gong, Kewei, Sun, Changzheng, Xiong, Bing, Han, Yanjun, Hao, Zhibiao, Wang, Jian, Wang, Lai, Li, HongtaoVolume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4975345
Date:
January, 2017
File:
PDF, 4.18 MB
english, 2017