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Study of sigma-shaped source/drain recesses for...

Microelectronic Engineering 2017 / 09 Vol. 181

Study of sigma-shaped source/drain recesses for embedded-SiGe pMOSFETs

Qin, Changliang, Yin, Huaxiang, Wang, Guilei, Hong, Peizhen, Ma, Xiaolong, Cui, Hushan, Lu, Yihong, Meng, Lingkuan, Yin, Haizhou, Zhong, Huicai, Yan, Jiang, Zhu, Huilong, Xu, Qiuxia, Li, Junfeng, Zhao
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Volume:
181
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.07.001
Date:
September, 2017
File:
PDF, 2.67 MB
english, 2017
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