Periodic Error Compensation in Fiber-coupled Heterodyne Interferometry
Lu, Chao, Burnham-Fay, Ethan D., Ellis, Jonathan D., Schmitz, Tony L., Tarbutton, Joshua A.Volume:
10
Year:
2017
Language:
english
Journal:
Procedia Manufacturing
DOI:
10.1016/j.promfg.2017.07.015
File:
PDF, 410 KB
english, 2017