A CMOS compatible micro-Pirani vacuum sensor based on mutual heat transfer with 5-decade operating range and 0.3 Pa detection limit
Piotto, Massimo, Del Cesta, Simone, Bruschi, PaoloLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.06.033
Date:
July, 2017
File:
PDF, 2.61 MB
english, 2017