Design, Simulation, and Experimental Testing of a Spatially...

IFAC Proceedings Volumes 2004 / 01 Vol. 37; Iss. 1

Design, Simulation, and Experimental Testing of a Spatially Controllable CVD Reactor

Choo, Jae-Ouk, Adomaitis, Raymond A., Rubloff, Gary W., Henn-Lecordier, Laurent, Liu, Yijun
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Volume:
37
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.1016/s1474-6670(17)38791-8
Date:
January, 2004
File:
PDF, 7.42 MB
english, 2004
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